Modeling and prediction of thermally induced imaging errors in deep- and extreme-ultraviolet lithography

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Electrical Engineering
Supervisors/Advisors	Coene, Wim, Promotor Weiland, Siep, Promotor
Award date	16 Dec 2013
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	978-90-386-3515-6
DOIs	https://doi.org/10.6100/IR761509
Publication status	Published - 2013

Proefschrift.

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@phdthesis{11abf3cdae7e4ae2a44ff9aeb30e4a43,

title = "Modeling and prediction of thermally induced imaging errors in deep- and extreme-ultraviolet lithography",

author = "C. Bikcora",

note = "Proefschrift.",

year = "2013",

doi = "10.6100/IR761509",

language = "English",

isbn = "978-90-386-3515-6",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Electrical Engineering",

}