Modeling and control of thermomechanical systems: managing heat-induced deformation in extreme ultraviolet lithography

Daniël Willem Maria Veldman

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

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Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Mechanical Engineering
Supervisors/Advisors
  • Nijmeijer, Henk, Promotor
  • Zwart, Hans J., Promotor
  • Fey, Rob H.B., Copromotor
Award date11 Sep 2020
Place of PublicationEindhoven
Publisher
Print ISBNs978-90-386-5091-3
Publication statusPublished - 11 Sep 2020

Bibliographical note

Proefschrift.

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