Modeling and compensation of asymmetric hysteresis in a piezo actuated metrological AFM

R.J.E. Merry, M. Uyanik, K.R. Koops, M.J.G. Molengraft, van de, M.G.A. Veghel, van, M. Steinbuch

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Engineering & Materials Science