Modeling and compensation of asymmetric hysteresis in a piezo actuated metrological AFM

R.J.E. Merry, M. Uyanik, K.R. Koops, M.J.G. Molengraft, van de, M.G.A. Veghel, van, M. Steinbuch

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Abstract

The manipulation of samples in atomic force microscopes (AFMs) is often performed using piezoelectric actuators. In this paper, a metrological AFM with a 3 degree-of-freedom (DOF) stage driven by piezo-stack actuators is considered. The piezo actuators exhibit hysteresis, which can change the system dynamics and/or acts as a non-linear disturbance on the system. This deteriorates the performance of the AFM. The 3 DOF stage exhibits asymmetric hysteresis, which is modeled by extending the Coleman-Hodgdon model. The asymmetry includes a scan range dependent offset and an asymmetry between the trace and retrace directions. Non-linear multi-variable optimization is employed to derive the optimal generic model for all scan ranges. The proposed extended Coleman-Hodgdon model describes the asymmetric hysteresis over all scan ranges with an accuracy of 97%. Based on the model, a feedforward compensation method is developed. Experiments on the metrological AFM show that the application of the hysteresis feedforward largely improves the scanning accuracy.
Original languageEnglish
Title of host publicationProceedings of the 28th American Control Conference, (ACC '09) 10 - 12 June 2009, St. Louis, MO, USA
Place of PublicationPiscataway, NJ
PublisherInstitute of Electrical and Electronics Engineers
Pages967-972
ISBN (Print)978-1-4244-4523-3
DOIs
Publication statusPublished - 2009

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    Merry, R. J. E., Uyanik, M., Koops, K. R., Molengraft, van de, M. J. G., Veghel, van, M. G. A., & Steinbuch, M. (2009). Modeling and compensation of asymmetric hysteresis in a piezo actuated metrological AFM. In Proceedings of the 28th American Control Conference, (ACC '09) 10 - 12 June 2009, St. Louis, MO, USA (pp. 967-972). Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/ACC.2009.5160007