Model-driven engineering for litho scanners

J.P.M. Voeten, R. Schiffelers, W. Alberts, B.D. Theelen

Research output: Contribution to conferenceOtherAcademic

Original languageEnglish
Publication statusPublished - 2012
Eventconference; Invited presentation at ICTDelta 2012; 2012-10-24; 2012-10-24 -
Duration: 24 Oct 201224 Oct 2012

Conference

Conferenceconference; Invited presentation at ICTDelta 2012; 2012-10-24; 2012-10-24
Period24/10/1224/10/12
OtherInvited presentation at ICTDelta 2012

Cite this

Voeten, J. P. M., Schiffelers, R., Alberts, W., & Theelen, B. D. (2012). Model-driven engineering for litho scanners. conference; Invited presentation at ICTDelta 2012; 2012-10-24; 2012-10-24, .