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Model-based design of MEMS resonant pressure sensors
M.A.G. Suijlen
Research output
:
Thesis
›
Phd Thesis 1 (Research TU/e / Graduation TU/e)
1926
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Dive into the research topics of 'Model-based design of MEMS resonant pressure sensors'. Together they form a unique fingerprint.
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Engineering
Microelectromechanical System
100%
Pressure Sensor
100%
Resonator
100%
Damping Force
16%
Cellphone
16%
Resonance Mode
16%
Frequency Reference
16%
Residual Gas
16%
Testing Time
16%
Crystal Oscillator
16%
Reliable Operation
8%
Automotives
8%
Building Block
8%
Low Power Consumption
8%
Inkjet Printing
8%
System Safety
8%
Applicability
8%
Low-Temperature
8%
Noise Performance
8%
Phase Noise
8%
Mode Operation
8%
Clock Signal
8%
Numerical Evaluation
8%
Microelectronics
8%
High Quality Factor
8%
Telecommunication
8%
Cavity Pressure
8%
Digital Integrated Circuits
8%
Microsystem
8%
Sensitive Detection
8%
Physical Significance
8%
Molecular Flow
8%
Material Science
Microelectromechanical System
100%
Resonator
100%
Electronic Circuit
8%
Accelerometer
8%
Sensitive Detection
8%