Model-based control for high-tech mechatronic systems

Motion systems are mechanical systems with actuators with the primary function to position a load. The actuator can be either hydraulic, pneumatic, or electric. The feedback controller is typically designed using frequency domain techniques, in particular via manual loop-shaping. In addition to the feedback controller, a feedforward controller is often implemented with acceleration, velocity, and friction feedforward for the reference signal. This chapter provides an overview of a systematic control design procedure for motion systems that has proven its use in industrial motion control practise. A step-by-step procedure is presented that gradually extends single-input single-output (SISO) loop-shaping to the multi-input multi-output (MIMO) situation. This step-by-step procedure consists of interaction analysis, decoupling, independent SISO design, sequential SISO design, and finally, norm-based MIMO design. Extreme ultraviolet is a key technology for next-generation lithography.