Model and Verification of a Plasma Etching Reactor with a Switched-Mode Power Converter

Qihao Yu; Erik Lemmen; C.G.E. (Korneel) Wijnands; Bas J.D. Vermulst

doi:10.1109/ECCE-Asia49820.2021.9479244

Model and Verification of a Plasma Etching Reactor with a Switched-Mode Power Converter

Qihao Yu, Erik Lemmen, C.G.E. (Korneel) Wijnands, Bas J.D. Vermulst

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

2 Citations (Scopus)

253 Downloads (Pure)

Abstract

For reaching a high selectivity in plasma etching, it is required to precisely control the plasma ion energy. This can be realized by applying a tailored pulse-shape voltage waveform to the reactor table. Recent research has shown that switched-mode power converters can be used to generate this kind of waveform, with the benefit of increased efficiency compared to the traditional linear amplifier. However, the equivalent electric circuit model of the plasma etching reactor is required in order to do circuit simulation and make an optimized electronic design of such switched-mode power converters. Although several circuit models of the reactor have been presented in previous research, they can not be directly adopted in tailored pulse-shape biasing.

In this paper, a modified equivalent electric circuit model of the reactor is proposed. The plasma behaviour is modelled using the equivalent electric circuit and it is suitable for electric circuit simulation together with the power converter. Both the electrical waveforms and the normalized ion energy distribution can be obtained from the simulation, which are in line with the experimental results.

Original language	English
Title of host publication	12th International Conference on Electrical and Electromechanical Energy Conversion (ECCE Asia 2021)
Publisher	Institute of Electrical and Electronics Engineers
Pages	568-573
Number of pages	6
ISBN (Electronic)	978-1-7281-6344-4
ISBN (Print)	978-1-7281-6345-1
DOIs	https://doi.org/10.1109/ECCE-Asia49820.2021.9479244
Publication status	Published - 13 Jul 2021
Event	12th Annual Energy Conversion Congress and Exposition, ECCE-Asia 2021 - Virtual, Singapore, Singapore Duration: 24 May 2021 → 27 May 2021 Conference number: 12 https://ecceasia2021.com/

Conference

Conference	12th Annual Energy Conversion Congress and Exposition, ECCE-Asia 2021
Abbreviated title	ECCE 2021
Country/Territory	Singapore
City	Singapore
Period	24/05/21 → 27/05/21
Internet address	https://ecceasia2021.com/

Keywords

Equivalent electric circuit
ion energy disrtibution
plasma etching
switched-mode power converter
tailored pulse-shape biasing
equivalent electric circuit
ion energy distribution

Access to Document

10.1109/ECCE-Asia49820.2021.9479244

2021064804Final author version , 2.1 MB

Cite this

Yu, Q., Lemmen, E., Wijnands, C. G. E., & Vermulst, B. J. D. (2021). Model and Verification of a Plasma Etching Reactor with a Switched-Mode Power Converter. In 12th International Conference on Electrical and Electromechanical Energy Conversion (ECCE Asia 2021) (pp. 568-573). Article 9479244 Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/ECCE-Asia49820.2021.9479244

@inproceedings{4744a83fd1d44679b2723b53d9f34b30,

title = "Model and Verification of a Plasma Etching Reactor with a Switched-Mode Power Converter",

abstract = "For reaching a high selectivity in plasma etching, it is required to precisely control the plasma ion energy. This can be realized by applying a tailored pulse-shape voltage waveform to the reactor table. Recent research has shown that switched-mode power converters can be used to generate this kind of waveform, with the benefit of increased efficiency compared to the traditional linear amplifier. However, the equivalent electric circuit model of the plasma etching reactor is required in order to do circuit simulation and make an optimized electronic design of such switched-mode power converters. Although several circuit models of the reactor have been presented in previous research, they can not be directly adopted in tailored pulse-shape biasing.In this paper, a modified equivalent electric circuit model of the reactor is proposed. The plasma behaviour is modelled using the equivalent electric circuit and it is suitable for electric circuit simulation together with the power converter. Both the electrical waveforms and the normalized ion energy distribution can be obtained from the simulation, which are in line with the experimental results.",

keywords = "Equivalent electric circuit, ion energy disrtibution, plasma etching, switched-mode power converter, tailored pulse-shape biasing, equivalent electric circuit, ion energy distribution",

author = "Qihao Yu and Erik Lemmen and Wijnands, {C.G.E. (Korneel)} and Vermulst, {Bas J.D.}",

year = "2021",

month = jul,

day = "13",

doi = "10.1109/ECCE-Asia49820.2021.9479244",

language = "English",

isbn = "978-1-7281-6345-1",

pages = "568--573",

booktitle = "12th International Conference on Electrical and Electromechanical Energy Conversion (ECCE Asia 2021)",

publisher = "Institute of Electrical and Electronics Engineers",

address = "United States",

note = "12th Annual Energy Conversion Congress and Exposition, ECCE-Asia 2021, ECCE 2021 ; Conference date: 24-05-2021 Through 27-05-2021",

url = "https://ecceasia2021.com/",

}

Yu, Q, Lemmen, E , Wijnands, CGE & Vermulst, BJD 2021, Model and Verification of a Plasma Etching Reactor with a Switched-Mode Power Converter. in 12th International Conference on Electrical and Electromechanical Energy Conversion (ECCE Asia 2021)., 9479244, Institute of Electrical and Electronics Engineers, pp. 568-573, 12th Annual Energy Conversion Congress and Exposition, ECCE-Asia 2021, Singapore, Singapore, 24/05/21. https://doi.org/10.1109/ECCE-Asia49820.2021.9479244

Model and Verification of a Plasma Etching Reactor with a Switched-Mode Power Converter. / Yu, Qihao; Lemmen, Erik ; Wijnands, C.G.E. (Korneel) et al.
12th International Conference on Electrical and Electromechanical Energy Conversion (ECCE Asia 2021). Institute of Electrical and Electronics Engineers, 2021. p. 568-573 9479244.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Model and Verification of a Plasma Etching Reactor with a Switched-Mode Power Converter

AU - Yu, Qihao

AU - Lemmen, Erik

AU - Wijnands, C.G.E. (Korneel)

AU - Vermulst, Bas J.D.

N1 - Conference code: 12

PY - 2021/7/13

Y1 - 2021/7/13

N2 - For reaching a high selectivity in plasma etching, it is required to precisely control the plasma ion energy. This can be realized by applying a tailored pulse-shape voltage waveform to the reactor table. Recent research has shown that switched-mode power converters can be used to generate this kind of waveform, with the benefit of increased efficiency compared to the traditional linear amplifier. However, the equivalent electric circuit model of the plasma etching reactor is required in order to do circuit simulation and make an optimized electronic design of such switched-mode power converters. Although several circuit models of the reactor have been presented in previous research, they can not be directly adopted in tailored pulse-shape biasing.In this paper, a modified equivalent electric circuit model of the reactor is proposed. The plasma behaviour is modelled using the equivalent electric circuit and it is suitable for electric circuit simulation together with the power converter. Both the electrical waveforms and the normalized ion energy distribution can be obtained from the simulation, which are in line with the experimental results.

AB - For reaching a high selectivity in plasma etching, it is required to precisely control the plasma ion energy. This can be realized by applying a tailored pulse-shape voltage waveform to the reactor table. Recent research has shown that switched-mode power converters can be used to generate this kind of waveform, with the benefit of increased efficiency compared to the traditional linear amplifier. However, the equivalent electric circuit model of the plasma etching reactor is required in order to do circuit simulation and make an optimized electronic design of such switched-mode power converters. Although several circuit models of the reactor have been presented in previous research, they can not be directly adopted in tailored pulse-shape biasing.In this paper, a modified equivalent electric circuit model of the reactor is proposed. The plasma behaviour is modelled using the equivalent electric circuit and it is suitable for electric circuit simulation together with the power converter. Both the electrical waveforms and the normalized ion energy distribution can be obtained from the simulation, which are in line with the experimental results.

KW - Equivalent electric circuit

KW - ion energy disrtibution

KW - plasma etching

KW - switched-mode power converter

KW - tailored pulse-shape biasing

KW - equivalent electric circuit

KW - ion energy distribution

UR - http://www.scopus.com/inward/record.url?scp=85114210082&partnerID=8YFLogxK

U2 - 10.1109/ECCE-Asia49820.2021.9479244

DO - 10.1109/ECCE-Asia49820.2021.9479244

M3 - Conference contribution

SN - 978-1-7281-6345-1

SP - 568

EP - 573

BT - 12th International Conference on Electrical and Electromechanical Energy Conversion (ECCE Asia 2021)

PB - Institute of Electrical and Electronics Engineers

T2 - 12th Annual Energy Conversion Congress and Exposition, ECCE-Asia 2021

Y2 - 24 May 2021 through 27 May 2021

ER -

Model and Verification of a Plasma Etching Reactor with a Switched-Mode Power Converter

Abstract

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Cite this