Mode switching control in stages with synchronized motion

P. Hatzidimitris, M.F. Heertjes, T. ten Dam

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

9 Downloads (Pure)

Abstract

During the chuck swap process of a wafer scanner, i.e. the exchange of the measured chuck with the exposed chuck, a control mode switch occurs between two measurement systems. As a result of this switch, unwanted transients occur in the wafer stage system: the long-stroke (LoS) and the short-stroke (SS) wafer stage modules. By means of initial value compensation, an impulsive force is used to counteract these transients. But in view of actuator limitations, this appears insufficient and the following solution is proposed. Upon occurrence of a mode switch, the setpoint is adjusted with a third-order profile that limits the required actuator forces by limiting the jerk levels. The profile is scaled with the velocity difference measured over the mode switch. As a result, a continuous and smooth transition of the position signals is obtained. In addition, the SS feedforward controller is replaced by a feedback term in the multivariable and synchronized wafer stage system. This removes the interaction term from the LoS to the SS module, which decouples the synchronization performance from mode switching, and which renders the control design multi-loop SISO.
Original languageEnglish
Title of host publicationProceedings of the International Workshop on Sensing, Actuation, and Motion Control (SAMCON 2015), 9-10 march 2015, Nagoya, Japan
Pages1-6
Number of pages6
Publication statusPublished - 2015
Event1st IEEJ International Workshop on Sensing, Actuation, and Motion Control (SAMCON 2015) - Nagoya, Japan
Duration: 9 Mar 201510 Mar 2015
Conference number: 1
http://www2.iee.or.jp/~diic/samcon/2015/index.html

Workshop

Workshop1st IEEJ International Workshop on Sensing, Actuation, and Motion Control (SAMCON 2015)
Abbreviated titleSAMCON 2015
CountryJapan
CityNagoya
Period9/03/1510/03/15
Internet address

Fingerprint Dive into the research topics of 'Mode switching control in stages with synchronized motion'. Together they form a unique fingerprint.

Cite this