Modal Identification for Multivariable Motion Systems: Applied to a Prototype Wafer-Stage

Maarten van der Hulst; Rodrigo González; Koen Classens; P.J.M.M. Tacx; N.J. Dirkx; J.J.M. van de Wijdeven; Tom A.E. Oomen

Modal Identification for Multivariable Motion Systems: Applied to a Prototype Wafer-Stage

Maarten van der Hulst, Rodrigo González, Koen Classens, P.J.M.M. Tacx, N.J. Dirkx, J.J.M. van de Wijdeven, Tom A.E. Oomen

Research output: Contribution to conference › Abstract › Academic

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Original language	Dutch
Pages	13
Number of pages	1
Publication status	Published - 28 Feb 2025
Event	44th Benelux Meeting on Systems and Control - Hotel Zuiderduin, Egmond aan Zee, Netherlands Duration: 18 Mar 2025 → 20 Mar 2025 Conference number: 44 https://www.beneluxmeeting.nl/

Conference

Conference	44th Benelux Meeting on Systems and Control
Abbreviated title	Benelux 2025
Country/Territory	Netherlands
City	Egmond aan Zee
Period	18/03/25 → 20/03/25
Internet address	https://www.beneluxmeeting.nl/

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pdfFinal published version, 197 KB

https://www.beneluxmeeting.nl/2025/program/book-of-abstracts

Cite this

van der Hulst, M., González, R., Classens, K., Tacx, P. J. M. M., Dirkx, N. J., van de Wijdeven, J. J. M., & Oomen, T. A. E. (2025). Modal Identification for Multivariable Motion Systems: Applied to a Prototype Wafer-Stage. 13. Abstract from 44th Benelux Meeting on Systems and Control, Egmond aan Zee, Netherlands. https://www.beneluxmeeting.nl/2025/program/book-of-abstracts

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AU - Classens, Koen

AU - Tacx, P.J.M.M.

AU - Dirkx, N.J.

AU - van de Wijdeven, J.J.M.

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