MOCVD of zirconium oxide from the zirconium guanidinate complex |ZrCp′{2-(iPrN)2CNMe2}2Cl]

C.S. Blackman; C.J. Carmalt; S.J.A. Moniz; S.E. Potts; H.O. Davies; D.C. Pugh

doi:10.1149/1.3207640

MOCVD of zirconium oxide from the zirconium guanidinate complex |ZrCp′{2-(iPrN)2CNMe2}2Cl]

C.S. Blackman, C.J. Carmalt, S.J.A. Moniz, S.E. Potts, H.O. Davies, D.C. Pugh

Plasma & Materials Processing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

6 Citations (Scopus)

Abstract

Parallel to successful studies into use of [ZrCp'{¿ 2-(iPrN)2CNMe2} 2Cl] as a precursor to the deposition of zirconium carbonitride via CVD the same precursor was utilised for the MOCVD of thin films of ZrO 2 using borosilicate glass substrates. The deposited films were of mixed phase; films deposited at temperatures below 550 °C were predominantly orthorhombic (or tetragonal), whilst films deposited at 600 °C were approximately 1:1 mixtures of monoclinic and orthorhombic (or tetragonal) ZrO2. Additionally the monoclinic phase displayed preferred orientation. Compositional analysis showed that whilst the films had significant amounts of, principally graphitic, carbon contamination, which increased with increasing deposition temperature, chlorine contamination was negligible. © The Electrochemical Society.

Original language	English
Title of host publication	17th International Chemical Vapor Deposition Symposium (CVD-XVII) as part of the 216th Meeting of the Electrochemical Society 4 -9 October 2009, Vienna
Place of Publication	Pennington, NJ
Publisher	Electrochemical Society, Inc.
Pages	561-565
ISBN (Print)	978-156677741-4
DOIs	https://doi.org/10.1149/1.3207640
Publication status	Published - 2009

Publication series

Name	ECS Transactions
Volume	25
ISSN (Print)	1938-6737

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10.1149/1.3207640

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Blackman, C. S., Carmalt, C. J., Moniz, S. J. A., Potts, S. E., Davies, H. O., & Pugh, D. C. (2009). MOCVD of zirconium oxide from the zirconium guanidinate complex |ZrCp′{2-(iPrN)2CNMe2}2Cl]. In 17th International Chemical Vapor Deposition Symposium (CVD-XVII) as part of the 216th Meeting of the Electrochemical Society 4 -9 October 2009, Vienna (pp. 561-565). (ECS Transactions; Vol. 25). Electrochemical Society, Inc.. https://doi.org/10.1149/1.3207640

Blackman, C.S. ; Carmalt, C.J. ; Moniz, S.J.A. et al. / MOCVD of zirconium oxide from the zirconium guanidinate complex |ZrCp′{2-(iPrN)2CNMe2}2Cl]. 17th International Chemical Vapor Deposition Symposium (CVD-XVII) as part of the 216th Meeting of the Electrochemical Society 4 -9 October 2009, Vienna. Pennington, NJ : Electrochemical Society, Inc., 2009. pp. 561-565 (ECS Transactions).

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title = "MOCVD of zirconium oxide from the zirconium guanidinate complex |ZrCp′{2-(iPrN)2CNMe2}2Cl]",

abstract = "Parallel to successful studies into use of [ZrCp'{¿ 2-(iPrN)2CNMe2} 2Cl] as a precursor to the deposition of zirconium carbonitride via CVD the same precursor was utilised for the MOCVD of thin films of ZrO 2 using borosilicate glass substrates. The deposited films were of mixed phase; films deposited at temperatures below 550 °C were predominantly orthorhombic (or tetragonal), whilst films deposited at 600 °C were approximately 1:1 mixtures of monoclinic and orthorhombic (or tetragonal) ZrO2. Additionally the monoclinic phase displayed preferred orientation. Compositional analysis showed that whilst the films had significant amounts of, principally graphitic, carbon contamination, which increased with increasing deposition temperature, chlorine contamination was negligible. {\textcopyright} The Electrochemical Society.",

author = "C.S. Blackman and C.J. Carmalt and S.J.A. Moniz and S.E. Potts and H.O. Davies and D.C. Pugh",

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series = "ECS Transactions",

publisher = "Electrochemical Society, Inc.",

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Blackman, CS, Carmalt, CJ, Moniz, SJA, Potts, SE, Davies, HO & Pugh, DC 2009, MOCVD of zirconium oxide from the zirconium guanidinate complex |ZrCp′{2-(iPrN)2CNMe2}2Cl]. in 17th International Chemical Vapor Deposition Symposium (CVD-XVII) as part of the 216th Meeting of the Electrochemical Society 4 -9 October 2009, Vienna. ECS Transactions, vol. 25, Electrochemical Society, Inc., Pennington, NJ, pp. 561-565. https://doi.org/10.1149/1.3207640

MOCVD of zirconium oxide from the zirconium guanidinate complex |ZrCp′{2-(iPrN)2CNMe2}2Cl]. / Blackman, C.S.; Carmalt, C.J.; Moniz, S.J.A. et al.
17th International Chemical Vapor Deposition Symposium (CVD-XVII) as part of the 216th Meeting of the Electrochemical Society 4 -9 October 2009, Vienna. Pennington, NJ: Electrochemical Society, Inc., 2009. p. 561-565 (ECS Transactions; Vol. 25).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - Blackman, C.S.

AU - Carmalt, C.J.

AU - Moniz, S.J.A.

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AU - Davies, H.O.

AU - Pugh, D.C.

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N2 - Parallel to successful studies into use of [ZrCp'{¿ 2-(iPrN)2CNMe2} 2Cl] as a precursor to the deposition of zirconium carbonitride via CVD the same precursor was utilised for the MOCVD of thin films of ZrO 2 using borosilicate glass substrates. The deposited films were of mixed phase; films deposited at temperatures below 550 °C were predominantly orthorhombic (or tetragonal), whilst films deposited at 600 °C were approximately 1:1 mixtures of monoclinic and orthorhombic (or tetragonal) ZrO2. Additionally the monoclinic phase displayed preferred orientation. Compositional analysis showed that whilst the films had significant amounts of, principally graphitic, carbon contamination, which increased with increasing deposition temperature, chlorine contamination was negligible. © The Electrochemical Society.

AB - Parallel to successful studies into use of [ZrCp'{¿ 2-(iPrN)2CNMe2} 2Cl] as a precursor to the deposition of zirconium carbonitride via CVD the same precursor was utilised for the MOCVD of thin films of ZrO 2 using borosilicate glass substrates. The deposited films were of mixed phase; films deposited at temperatures below 550 °C were predominantly orthorhombic (or tetragonal), whilst films deposited at 600 °C were approximately 1:1 mixtures of monoclinic and orthorhombic (or tetragonal) ZrO2. Additionally the monoclinic phase displayed preferred orientation. Compositional analysis showed that whilst the films had significant amounts of, principally graphitic, carbon contamination, which increased with increasing deposition temperature, chlorine contamination was negligible. © The Electrochemical Society.

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BT - 17th International Chemical Vapor Deposition Symposium (CVD-XVII) as part of the 216th Meeting of the Electrochemical Society 4 -9 October 2009, Vienna

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Blackman CS, Carmalt CJ, Moniz SJA, Potts SE, Davies HO, Pugh DC. MOCVD of zirconium oxide from the zirconium guanidinate complex |ZrCp′{2-(iPrN)2CNMe2}2Cl]. In 17th International Chemical Vapor Deposition Symposium (CVD-XVII) as part of the 216th Meeting of the Electrochemical Society 4 -9 October 2009, Vienna. Pennington, NJ: Electrochemical Society, Inc. 2009. p. 561-565. (ECS Transactions). doi: 10.1149/1.3207640

MOCVD of zirconium oxide from the zirconium guanidinate complex |ZrCp′{2-(iPrN)2CNMe2}2Cl]

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