Minimizing cross-talk in high-precision motion systems using data-based dynamic decoupling

To minimize cross-talk in high-precision motion systems, the possibilities of data-based dynamic decoupling are studied. Atop a model-based and static decoupling, a multi-input multi-output (MIMO) and finite impulse response (FIR) dynamic decoupling structure is considered for machine-specific and performance-driven fine tunings. The coefficients of the FIR filters are obtained via data-based optimization, whilst the machine operates under nominal and closed-loop conditions. The FIR filters provide the ability to generate zeros outside the origin. These zeros are needed in the description of the low-frequency inverted plant dynamics. In addition, a low-pass filter structure supports the ability to generate poles outside the origin as to account for plant zeros. Both filter structures are effectively used in the high-precision motion control of a state-of-the-art scanning stage system and an industrial vibration isolation system.