Microwave reactor for SiO2 deposition

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	Proceedings of the 1st Workshop Bochum-Eindhoven on microwave discharges, 26-28 November 2012, Bochum, Germany
Publication status	Published - 2012
Event	1st Workshop Bochum-Eindhoven on microwave discharges, 2012 - Bochum, Germany Duration: 26 Nov 2012 → 28 Nov 2012

Conference	1st Workshop Bochum-Eindhoven on microwave discharges, 2012
Country/Territory	Germany
City	Bochum
Period	26/11/12 → 28/11/12
Other	1st Workshop Bochum-Eindhoven on microwave discharges, 26-28 November 2012, Bochum, Germany

Cite this

@inproceedings{2cbe5ddb5ca947358f9fbdfc0ac2bef2,

title = "Microwave reactor for SiO2 deposition",

author = "E.H. Kemaneci and M. Jimenez-Diaz and \{Dijk, van\}, J. and G.M.W. Kroesen",

year = "2012",

language = "English",

booktitle = "Proceedings of the 1st Workshop Bochum-Eindhoven on microwave discharges, 26-28 November 2012, Bochum, Germany",

note = "1st Workshop Bochum-Eindhoven on microwave discharges, 2012 ; Conference date: 26-11-2012 Through 28-11-2012",

}

TY - GEN

T1 - Microwave reactor for SiO2 deposition

AU - Kemaneci, E.H.

AU - Jimenez-Diaz, M.

AU - Dijk, van, J.

AU - Kroesen, G.M.W.

PY - 2012

Y1 - 2012

M3 - Conference contribution

BT - Proceedings of the 1st Workshop Bochum-Eindhoven on microwave discharges, 26-28 November 2012, Bochum, Germany

T2 - 1st Workshop Bochum-Eindhoven on microwave discharges, 2012

Y2 - 26 November 2012 through 28 November 2012

ER -