Microwave reactor for SiO2 deposition

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publicationProceedings of the 1st Workshop Bochum-Eindhoven on microwave discharges, 26-28 November 2012, Bochum, Germany
Publication statusPublished - 2012
Event1st Workshop Bochum-Eindhoven on microwave discharges, 2012 - Bochum, Germany
Duration: 26 Nov 201228 Nov 2012

Conference

Conference1st Workshop Bochum-Eindhoven on microwave discharges, 2012
Country/TerritoryGermany
CityBochum
Period26/11/1228/11/12
Other1st Workshop Bochum-Eindhoven on microwave discharges, 26-28 November 2012, Bochum, Germany

Cite this