Chapter 10 of Thermal Aspects of Fluid Film Tribology by Oscar Pinkus deals with instrumentation techniques for thin film measurements. The chapter on film thickness measurements is dedicated to electrical and optical techniques. The section on microtransducers considers vapor deposited thin layer transducers. Complex transducer patterns can be realized by employing photolithography, allowing local measurements of film thickness, temperature and pressure.
|Title of host publication||Thermal aspects of fluid film tribology|
|Place of Publication||New York|
|Publisher||American Society of Mechanical Engineers|
|Number of pages||521|
|Publication status||Published - 1990|