Microtransducers

H.J. Leeuwen, van, H.A. Meijer, M.J.W. Schouten

Research output: Chapter in Book/Report/Conference proceedingChapterAcademicpeer-review

Abstract

Chapter 10 of Thermal Aspects of Fluid Film Tribology by Oscar Pinkus deals with instrumentation techniques for thin film measurements. The chapter on film thickness measurements is dedicated to electrical and optical techniques. The section on microtransducers considers vapor deposited thin layer transducers. Complex transducer patterns can be realized by employing photolithography, allowing local measurements of film thickness, temperature and pressure.
Original languageEnglish
Title of host publicationThermal aspects of fluid film tribology
Place of PublicationNew York
PublisherAmerican Society of Mechanical Engineers
Pages404-407
Number of pages521
ISBN (Print)0-7918-0011-3
Publication statusPublished - 1990

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