In this chapter, the use of femtosecond laser to fabricate glass-based microsystems and sensors is examined. Several advanced technology demonstrators are presented, including some very unusual fused silica MEMS. Present technological barriers are discussed.
|Title of host publication||Femtosecond laser micromachining : photonic and microfluidic devices in transparent materials|
|Editors||R. Osellame, G. Cerullo, R. Ramponi|
|Number of pages||483|
|Publication status||Published - 2012|
|Name||Topics in Applied Physics|