Microsystems and sensors

Y.J. Bellouard, A.A. Said, M. Dugan, P. Bado

Research output: Chapter in Book/Report/Conference proceedingChapterAcademic

1 Citation (Scopus)
1 Downloads (Pure)

Abstract

In this chapter, the use of femtosecond laser to fabricate glass-based microsystems and sensors is examined. Several advanced technology demonstrators are presented, including some very unusual fused silica MEMS. Present technological barriers are discussed.
Original languageEnglish
Title of host publicationFemtosecond laser micromachining : photonic and microfluidic devices in transparent materials
EditorsR. Osellame, G. Cerullo, R. Ramponi
PublisherSpringer
Pages443-465
Number of pages483
ISBN (Print)978-3-642-23365-4
DOIs
Publication statusPublished - 2012

Publication series

NameTopics in Applied Physics
Volume123
ISSN (Print)0303-4216

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  • Cite this

    Bellouard, Y. J., Said, A. A., Dugan, M., & Bado, P. (2012). Microsystems and sensors. In R. Osellame, G. Cerullo, & R. Ramponi (Eds.), Femtosecond laser micromachining : photonic and microfluidic devices in transparent materials (pp. 443-465). (Topics in Applied Physics; Vol. 123). Springer. https://doi.org/10.1007/978-3-642-23366-1_16