| Original language | English |
|---|---|
| Title of host publication | Microsystem Technology : Exploring Opportunities |
| Editors | G. Klein Ebbink |
| Place of Publication | Alphen aan den Rijn |
| Publisher | Samsom Bedrijfsinformatie |
| Pages | 50-64 |
| Number of pages | 15 |
| ISBN (Print) | 90-14-05088-7 |
| Publication status | Published - 1994 |
Microsystems and energy
P.A.F.M. Goemans
Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic › peer-review