Microstructure based overview and modeling of Al-Cu alloyed MEMS

B.A. Göttgens, J.P.M. Hoefnagels, L.I.J.C. Bergers

Research output: Book/ReportReportAcademic

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Abstract

Open Space project
Original languageEnglish
Place of PublicationEindhoven
PublisherTU/e
Number of pages47
Publication statusPublished - 2013

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MEMS
Microstructure

Cite this

Göttgens, B. A., Hoefnagels, J. P. M., & Bergers, L. I. J. C. (2013). Microstructure based overview and modeling of Al-Cu alloyed MEMS. Eindhoven: TU/e.
Göttgens, B.A. ; Hoefnagels, J.P.M. ; Bergers, L.I.J.C. / Microstructure based overview and modeling of Al-Cu alloyed MEMS. Eindhoven : TU/e, 2013. 47 p.
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title = "Microstructure based overview and modeling of Al-Cu alloyed MEMS",
abstract = "Open Space project",
author = "B.A. G{\"o}ttgens and J.P.M. Hoefnagels and L.I.J.C. Bergers",
year = "2013",
language = "English",
publisher = "TU/e",

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Göttgens, BA, Hoefnagels, JPM & Bergers, LIJC 2013, Microstructure based overview and modeling of Al-Cu alloyed MEMS. TU/e, Eindhoven.

Microstructure based overview and modeling of Al-Cu alloyed MEMS. / Göttgens, B.A.; Hoefnagels, J.P.M.; Bergers, L.I.J.C.

Eindhoven : TU/e, 2013. 47 p.

Research output: Book/ReportReportAcademic

TY - BOOK

T1 - Microstructure based overview and modeling of Al-Cu alloyed MEMS

AU - Göttgens, B.A.

AU - Hoefnagels, J.P.M.

AU - Bergers, L.I.J.C.

PY - 2013

Y1 - 2013

N2 - Open Space project

AB - Open Space project

M3 - Report

BT - Microstructure based overview and modeling of Al-Cu alloyed MEMS

PB - TU/e

CY - Eindhoven

ER -

Göttgens BA, Hoefnagels JPM, Bergers LIJC. Microstructure based overview and modeling of Al-Cu alloyed MEMS. Eindhoven: TU/e, 2013. 47 p.