Microstructure based overview and modeling of Al-Cu alloyed MEMS

B.A. Göttgens, J.P.M. Hoefnagels, L.I.J.C. Bergers

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Abstract

Open Space project
Original languageEnglish
Place of PublicationEindhoven
PublisherTU/e
Number of pages47
Publication statusPublished - 2013

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    Göttgens, B. A., Hoefnagels, J. P. M., & Bergers, L. I. J. C. (2013). Microstructure based overview and modeling of Al-Cu alloyed MEMS. Eindhoven: TU/e.