Microfluidic Tissue Barrier Sensor Chip with Integrated Microelectrodes and Ultrathin Microporous Membrane

Pratik V. Tawade; Hande Aydogmus; Lovro Ivancevic; Jia Jun Yeh; Vasiliki Gkouzioti; Jean Philippe Frimat; Jaap Den Toonder; Massimo Mastrangeli

doi:10.1109/MEMS61431.2025.10918254

Microfluidic Tissue Barrier Sensor Chip with Integrated Microelectrodes and Ultrathin Microporous Membrane

Pratik V. Tawade
, Hande Aydogmus
, Lovro Ivancevic
, Jia Jun Yeh
, Vasiliki Gkouzioti
, Jean Philippe Frimat
, Jaap Den Toonder
, Massimo Mastrangeli

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

3 Citations (Scopus)

63 Downloads (Pure)

Abstract

We present a novel silicon-based organ-on-chip (OoC) device featuring integrated microelectrodes to assess barrier function in biological tissue co-cultures. The microfluidic device consists of two vertically-stacked microchannels separated by a submicron-thin, microporous silicon nitride membrane, enabling in vivo-like proximity for co-cultured tissues. The integrated four-probe electrode geometry on slanted microchannel sidewalls ensures unobstructed optical access to the membrane and consistent measurement repeatability. Experimental validation through electrical impedance spectroscopy supported the device's sensitivity to sodium chloride concentration. Fabricated through a scalable, wafer-scale batch process, the device additionally demonstrated biocompatibility and optical transparency, representing a significant advancement for in situ tissue barrier assessments.

Original language	English
Title of host publication	2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025
Publisher	Institute of Electrical and Electronics Engineers
Pages	426-429
Number of pages	4
ISBN (Electronic)	979-8-3315-0889-0
DOIs	https://doi.org/10.1109/MEMS61431.2025.10918254
Publication status	Published - 19 Mar 2025
Event	38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025 - Kaohsiung, Taiwan Duration: 19 Jan 2025 → 23 Jan 2025

Conference

Conference	38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025
Country/Territory	Taiwan
City	Kaohsiung
Period	19/01/25 → 23/01/25

Keywords

barrier-on-chip
microfabrication
microfluidics
organ-on-chip
trans-epithelial electrical resistance

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10.1109/MEMS61431.2025.10918254

pdfFinal published version, 0.99 MBLicence: TAVERNE

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Tawade, P. V., Aydogmus, H., Ivancevic, L., Yeh, J. J., Gkouzioti, V., Frimat, J. P., Den Toonder, J., & Mastrangeli, M. (2025). Microfluidic Tissue Barrier Sensor Chip with Integrated Microelectrodes and Ultrathin Microporous Membrane. In 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025 (pp. 426-429). Article 10918254 Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/MEMS61431.2025.10918254

@inproceedings{d685b52ad920473289bee0f65f206c80,

title = "Microfluidic Tissue Barrier Sensor Chip with Integrated Microelectrodes and Ultrathin Microporous Membrane",

abstract = "We present a novel silicon-based organ-on-chip (OoC) device featuring integrated microelectrodes to assess barrier function in biological tissue co-cultures. The microfluidic device consists of two vertically-stacked microchannels separated by a submicron-thin, microporous silicon nitride membrane, enabling in vivo-like proximity for co-cultured tissues. The integrated four-probe electrode geometry on slanted microchannel sidewalls ensures unobstructed optical access to the membrane and consistent measurement repeatability. Experimental validation through electrical impedance spectroscopy supported the device's sensitivity to sodium chloride concentration. Fabricated through a scalable, wafer-scale batch process, the device additionally demonstrated biocompatibility and optical transparency, representing a significant advancement for in situ tissue barrier assessments.",

keywords = "barrier-on-chip, microfabrication, microfluidics, organ-on-chip, trans-epithelial electrical resistance",

author = "Tawade, \{Pratik V.\} and Hande Aydogmus and Lovro Ivancevic and Yeh, \{Jia Jun\} and Vasiliki Gkouzioti and Frimat, \{Jean Philippe\} and \{Den Toonder\}, Jaap and Massimo Mastrangeli",

year = "2025",

month = mar,

day = "19",

doi = "10.1109/MEMS61431.2025.10918254",

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pages = "426--429",

booktitle = "2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025",

publisher = "Institute of Electrical and Electronics Engineers",

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note = "38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025 ; Conference date: 19-01-2025 Through 23-01-2025",

}

Tawade, PV, Aydogmus, H, Ivancevic, L, Yeh, JJ, Gkouzioti, V, Frimat, JP, Den Toonder, J & Mastrangeli, M 2025, Microfluidic Tissue Barrier Sensor Chip with Integrated Microelectrodes and Ultrathin Microporous Membrane. in 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025., 10918254, Institute of Electrical and Electronics Engineers, pp. 426-429, 38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025, Kaohsiung, Taiwan, 19/01/25. https://doi.org/10.1109/MEMS61431.2025.10918254

Microfluidic Tissue Barrier Sensor Chip with Integrated Microelectrodes and Ultrathin Microporous Membrane. / Tawade, Pratik V.; Aydogmus, Hande; Ivancevic, Lovro et al.
2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Institute of Electrical and Electronics Engineers, 2025. p. 426-429 10918254.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Microfluidic Tissue Barrier Sensor Chip with Integrated Microelectrodes and Ultrathin Microporous Membrane

AU - Tawade, Pratik V.

AU - Aydogmus, Hande

AU - Ivancevic, Lovro

AU - Yeh, Jia Jun

AU - Gkouzioti, Vasiliki

AU - Frimat, Jean Philippe

AU - Den Toonder, Jaap

AU - Mastrangeli, Massimo

PY - 2025/3/19

Y1 - 2025/3/19

N2 - We present a novel silicon-based organ-on-chip (OoC) device featuring integrated microelectrodes to assess barrier function in biological tissue co-cultures. The microfluidic device consists of two vertically-stacked microchannels separated by a submicron-thin, microporous silicon nitride membrane, enabling in vivo-like proximity for co-cultured tissues. The integrated four-probe electrode geometry on slanted microchannel sidewalls ensures unobstructed optical access to the membrane and consistent measurement repeatability. Experimental validation through electrical impedance spectroscopy supported the device's sensitivity to sodium chloride concentration. Fabricated through a scalable, wafer-scale batch process, the device additionally demonstrated biocompatibility and optical transparency, representing a significant advancement for in situ tissue barrier assessments.

AB - We present a novel silicon-based organ-on-chip (OoC) device featuring integrated microelectrodes to assess barrier function in biological tissue co-cultures. The microfluidic device consists of two vertically-stacked microchannels separated by a submicron-thin, microporous silicon nitride membrane, enabling in vivo-like proximity for co-cultured tissues. The integrated four-probe electrode geometry on slanted microchannel sidewalls ensures unobstructed optical access to the membrane and consistent measurement repeatability. Experimental validation through electrical impedance spectroscopy supported the device's sensitivity to sodium chloride concentration. Fabricated through a scalable, wafer-scale batch process, the device additionally demonstrated biocompatibility and optical transparency, representing a significant advancement for in situ tissue barrier assessments.

KW - barrier-on-chip

KW - microfabrication

KW - microfluidics

KW - organ-on-chip

KW - trans-epithelial electrical resistance

UR - https://www.scopus.com/pages/publications/105001664543

U2 - 10.1109/MEMS61431.2025.10918254

DO - 10.1109/MEMS61431.2025.10918254

M3 - Conference contribution

AN - SCOPUS:105001664543

SP - 426

EP - 429

BT - 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025

PB - Institute of Electrical and Electronics Engineers

T2 - 38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025

Y2 - 19 January 2025 through 23 January 2025

ER -

Tawade PV, Aydogmus H, Ivancevic L, Yeh JJ, Gkouzioti V, Frimat JP et al. Microfluidic Tissue Barrier Sensor Chip with Integrated Microelectrodes and Ultrathin Microporous Membrane. In 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Institute of Electrical and Electronics Engineers. 2025. p. 426-429. 10918254 doi: 10.1109/MEMS61431.2025.10918254

Microfluidic Tissue Barrier Sensor Chip with Integrated Microelectrodes and Ultrathin Microporous Membrane

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