Micro process technology, 2. processing

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Original language	English
Title of host publication	Ullmann's Encyclopedia of Industrial Chemistry, 7th edition
Place of Publication	Hoboken
Publisher	Wiley
ISBN (Print)	978-3-527-32943-4
DOIs	https://doi.org/10.1002/14356007.b16_b37.pub2
Publication status	Published - 2012

Access to Document

@inbook{ed87f0dfaf3d43568029e75723005b00,

title = "Micro process technology, 2. processing",

author = "V. Hessel and T. No{\"e}l",

year = "2012",

doi = "10.1002/14356007.b16\_b37.pub2",

language = "English",

isbn = "978-3-527-32943-4",

booktitle = "Ullmann's Encyclopedia of Industrial Chemistry, 7th edition",

publisher = "Wiley",

address = "United States",

}