Original language | English |
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Title of host publication | Ullmann's Encyclopedia of Industrial Chemistry, 7th edition |
Place of Publication | Hoboken |
Publisher | Wiley |
ISBN (Print) | 978-3-527-32943-4 |
DOIs | |
Publication status | Published - 2012 |
Micro process technology, 2. processing
V. Hessel, T. Noël
Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic › peer-review
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