| Original language | English |
|---|---|
| Title of host publication | 4M2006 Conference on Multi-Material Micro Manufacture |
| Place of Publication | France, Grenoble |
| Publication status | Published - 2006 |
Micro- and Nano-Structuring using Ion Beams
W.H. Bruenger, A.H. Dietzel, H. Loeschner, E. Platzgummer
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic