Metrology model driven sequence execution framework

Global trends in the high technology sector depend of the delivered ASML lithography machines. The strict requirements and the tight deadlines influence directly the metrology software development. Because of these reasons software developers left sometimes some software design principles unattended in favor of quick implementation of new features, which resulted in increasing the technical debt. This report describes the design and implementation of a proof of concept domain model for the future metrology software, taking a realistic example as business case. The domain-driven design (DDD) is used to create the domain model. It is the core of the product, which express the metrology behavior, relations, its entities, and their attributes. The Onion architecture principles emphases also the importance of the domain model and puts it in the center of the implementation. In that way the domain model is isolated from the environment and infrastructure, which increases the software maintainability. Moreover, the calculation and the control logic is split, which prevents the overlap in the daily work between the functional engineers and software engineers.