Metrology for MEMS; MEMS for Metrology

H. Haitjema, J.K. Seggelen, van, W.O. Pril, E.C.N. Puik, P.H.J. Schellekens

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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It is shown how 3-D metrology can be used for MEMS measurements. Part of a MEMS-3-D CMM can be a probe, prepared by MEMS technology.
Original languageEnglish
Title of host publicationMEMSTAND: Standardisation for Microsystems: the Way Forward
Place of PublicationSpain, Barcelona
Publication statusPublished - 2003

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