Methods and apparatus for determining electromagnetic scattering properties and structural parameters of periodic structures

R. Dirks (Inventor), I.D. Setija (Inventor), M.G.M.M. Kraaij, van (Inventor), M.C. Beurden, van (Inventor)

Research output: PatentPatent publication

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Abstract

Numerical calculation of electromagnetic scattering properties and structural parameters of periodic structures is disclosed. A reflection coefficient has a representation as a bilinear or sesquilinear form. Computations of reflection coefficients and their derivatives for a single outgoing direction can benefit from an adjoint-state variable. Because the linear operator is identical for all angles of incidence that contribute to the same outgoing wave direction, there exists a single adjoint-state variable that generates all reflection coefficients from all incident waves that contribute to the outgoing wave. This adjoint-state variable can be obtained by numerically solving a single linear system, whereas one otherwise would need to solve a number of linear systems equal to the number of angles of incidence.
Original languageEnglish
Patent numberUS8645109 (B2)
Priority date29/11/10
Publication statusPublished - 4 Feb 2014

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