Methods and apparatus for calculating electromagnetic scattering properties of a structure and for reconstruction of approximate structures

Maxim Pisarenco (Inventor), F.S. Schneider (Inventor), M.G.M.M. van Kraaij (Inventor), M.C. van Beurden (Inventor)

Research output: PatentPatent application

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Abstract

Disclosed is a method for reconstructing a parameter of a lithographic process. The method comprises the step of designing a preconditioner suitable for an input system comprising the difference of a first matrix and a second matrix, the first matrix being arranged to have a multi-level structure of at least three levels whereby at least two of said levels comprise a Toeplitz structure. One such preconditioner is a block-diagonal matrix comprising a BTTB structure generated from a matrix-valued inverse generating function. A second such preconditioner is determined from an approximate decomposition of said first matrix into one or more Kronecker products.
Original languageEnglish
IPCWO2018108503
Priority date13/12/16
Filing date27/11/17
Publication statusPublished - 21 Jun 2018

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