Methods and apparatus for calculating electromagnetic scattering properties of a structure and for reconstruction of approximate structures

Maxim Pisarenco; F.S. Schneider; M.G.M.M. van Kraaij; M.C. van Beurden

Methods and apparatus for calculating electromagnetic scattering properties of a structure and for reconstruction of approximate structures

Maxim Pisarenco (Inventor), F.S. Schneider (Inventor), M.G.M.M. van Kraaij (Inventor), M.C. van Beurden (Inventor)

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Abstract

Disclosed is a method for reconstructing a parameter of a lithographic process. The method comprises the step of designing a preconditioner suitable for an input system comprising the difference of a first matrix and a second matrix, the first matrix being arranged to have a multi-level structure of at least three levels whereby at least two of said levels comprise a Toeplitz structure. One such preconditioner is a block-diagonal matrix comprising a BTTB structure generated from a matrix-valued inverse generating function. A second such preconditioner is determined from an approximate decomposition of said first matrix into one or more Kronecker products.

Original language	English
IPC	WO2018108503
Priority date	13/12/16
Filing date	27/11/17
Publication status	Published - 21 Jun 2018

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title = "Methods and apparatus for calculating electromagnetic scattering properties of a structure and for reconstruction of approximate structures",

abstract = "Disclosed is a method for reconstructing a parameter of a lithographic process. The method comprises the step of designing a preconditioner suitable for an input system comprising the difference of a first matrix and a second matrix, the first matrix being arranged to have a multi-level structure of at least three levels whereby at least two of said levels comprise a Toeplitz structure. One such preconditioner is a block-diagonal matrix comprising a BTTB structure generated from a matrix-valued inverse generating function. A second such preconditioner is determined from an approximate decomposition of said first matrix into one or more Kronecker products.",

author = "Maxim Pisarenco and F.S. Schneider and {van Kraaij}, M.G.M.M. and {van Beurden}, M.C.",

year = "2018",

month = jun,

day = "21",

language = "English",

type = "Patent",

note = "WO2018108503",

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TY - PAT

T1 - Methods and apparatus for calculating electromagnetic scattering properties of a structure and for reconstruction of approximate structures

AU - Pisarenco, Maxim

AU - Schneider, F.S.

AU - van Kraaij, M.G.M.M.

AU - van Beurden, M.C.

PY - 2018/6/21

Y1 - 2018/6/21

N2 - Disclosed is a method for reconstructing a parameter of a lithographic process. The method comprises the step of designing a preconditioner suitable for an input system comprising the difference of a first matrix and a second matrix, the first matrix being arranged to have a multi-level structure of at least three levels whereby at least two of said levels comprise a Toeplitz structure. One such preconditioner is a block-diagonal matrix comprising a BTTB structure generated from a matrix-valued inverse generating function. A second such preconditioner is determined from an approximate decomposition of said first matrix into one or more Kronecker products.

AB - Disclosed is a method for reconstructing a parameter of a lithographic process. The method comprises the step of designing a preconditioner suitable for an input system comprising the difference of a first matrix and a second matrix, the first matrix being arranged to have a multi-level structure of at least three levels whereby at least two of said levels comprise a Toeplitz structure. One such preconditioner is a block-diagonal matrix comprising a BTTB structure generated from a matrix-valued inverse generating function. A second such preconditioner is determined from an approximate decomposition of said first matrix into one or more Kronecker products.

M3 - Patent application

Y2 - 2017/11/27

ER -

Methods and apparatus for calculating electromagnetic scattering properties of a structure and for reconstruction of approximate structures

Abstract

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