Method of planning tasks in a machine, method of controlling a machine, supervisory machine control system, lithographic apparatus lithographic processing cell and computer program

N.J.M. Nieuwelaar, van den; J. Onvlee; R. Boumen; R.J. Dumont; H.P.J. Lierop, van; J.E. Rooda

Method of planning tasks in a machine, method of controlling a machine, supervisory machine control system, lithographic apparatus lithographic processing cell and computer program

N.J.M. Nieuwelaar, van den (Inventor), J. Onvlee (Inventor), R. Boumen (Inventor), R.J. Dumont (Inventor), H.P.J. Lierop, van (Inventor), J.E. Rooda (Inventor)

Research output: Patent › Patent publication

Abstract

A method of planning tasks to be performed in a machine derives a precedence graph by linking subsidiary tasks to a sequence of key tasks to create a scheduling problem that can be solved by an automated scheduler.

Original language	English
Patent number	US 7184849
Publication status	Published - 27 Feb 2007

Cite this

@misc{64c462756fd447899062d4749b518f0a,

title = "Method of planning tasks in a machine, method of controlling a machine, supervisory machine control system, lithographic apparatus lithographic processing cell and computer program",

abstract = "A method of planning tasks to be performed in a machine derives a precedence graph by linking subsidiary tasks to a sequence of key tasks to create a scheduling problem that can be solved by an automated scheduler.",

author = "{Nieuwelaar, van den}, N.J.M. and J. Onvlee and R. Boumen and R.J. Dumont and {Lierop, van}, H.P.J. and J.E. Rooda",

year = "2007",

month = feb,

day = "27",

language = "English",

type = "Patent",

note = "US 7184849",

}

TY - PAT

T1 - Method of planning tasks in a machine, method of controlling a machine, supervisory machine control system, lithographic apparatus lithographic processing cell and computer program

AU - Nieuwelaar, van den, N.J.M.

AU - Onvlee, J.

AU - Boumen, R.

AU - Dumont, R.J.

AU - Lierop, van, H.P.J.

AU - Rooda, J.E.

PY - 2007/2/27

Y1 - 2007/2/27

N2 - A method of planning tasks to be performed in a machine derives a precedence graph by linking subsidiary tasks to a sequence of key tasks to create a scheduling problem that can be solved by an automated scheduler.

AB - A method of planning tasks to be performed in a machine derives a precedence graph by linking subsidiary tasks to a sequence of key tasks to create a scheduling problem that can be solved by an automated scheduler.

M3 - Patent publication

M1 - US 7184849

ER -

Method of planning tasks in a machine, method of controlling a machine, supervisory machine control system, lithographic apparatus lithographic processing cell and computer program

Abstract

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