Method of adaptive interactice learning control and Apparatus employing such a methodol and a Lithographic Manufacturing

I. Rotariu (Inventor), R.M.L. Ellenbroek (Inventor), M. Steinbuch (Inventor), G.E. Baars, van (Inventor)

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@misc{5709ef85307848e5a4eceff81afdfe37,

title = "Method of adaptive interactice learning control and Apparatus employing such a methodol and a Lithographic Manufacturing",

author = "I. Rotariu and R.M.L. Ellenbroek and M. Steinbuch and {Baars, van}, G.E.",

year = "2005",

month = feb,

day = "24",

language = "English",

type = "Patent",

note = "US2005043834 (A1)",

}

TY - PAT

T1 - Method of adaptive interactice learning control and Apparatus employing such a methodol and a Lithographic Manufacturing

AU - Rotariu, I.

AU - Ellenbroek, R.M.L.

AU - Steinbuch, M.

AU - Baars, van, G.E.

PY - 2005/2/24

Y1 - 2005/2/24

UR - http://worldwide.espacenet.com/searchResults?NUM=US2005043834&DB=EPODOC

M3 - Patent publication

M1 - US2005043834 (A1)

ER -