METHOD FOR INSPECTION OF A TARGET OBJECT, CONTROL SYSTEM AND INSPECTION SYSTEM

Jacobus Lodevicus Martinus Van Mechelen (Inventor), Deran Maas (Inventor), Andreas Frank (Inventor)

Research output: PatentPatent publication

Abstract

A method for inspection of a target object (38), the method comprising irradiating a reference surface (66) having a non-flat reference profile (68) with radiation (58); determining reference response data based on detected radiation (58) having interacted with the reference surface (66); irradiating a target object (38) with radiation (58), the target object (38) comprising a target surface (70) having a non-flat target profile (72) corresponding to the reference profile (68); determining inspection response data based on detected radiation (58) having interacted with the target object (38); and determining at least one parameter of the target object (38) based on the reference response data and the inspection response data. An alternative method; a control system (18) for controlling an emitter system (40) and a detector system (42); and an inspection system (14) comprising a control system (18), an emitter system (40) and a detector system (42), are also provided.

Original languageEnglish
Patent numberWO2020038573
IPCG01N 21/ 84 A I
Priority date23/08/18
Publication statusPublished - 27 Feb 2020
Externally publishedYes

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