Method for applying a thin film barrier stack to a device with microstructures, and device provided with such a thin film barrier stack

W.S. Mischke (Inventor), F.J.H. Assche, van (Inventor), F.C. Dings (Inventor), R.T. Vangheluwe (Inventor), W.M.M. Kessels (Inventor), M.C.M. Sanden, van de (Inventor)

Research output: Patent › Patent publication

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