Method and arrangement for treating a substrate with an atmospheric pressure glow plasma (apg)

M.C.M. Sanden, van de (Inventor), E. Aldea (Inventor), Fuyuhiko Mori (Inventor), H.W. Vries, de (Inventor)

Research output: PatentPatent publication

Abstract

Method and arrangement for generating an atmospheric pressure glow (APG) plasma (1), wherein the plasma (1) is generated in a discharge space (10) between a plurality of electrodes (3, 4). A dielectric (2) is present on at least one of the electrodes (4), which dielectric (2) has a boundary surface with the plasma (1) enabling interactions between the plasma (1) and the boundary surface of the dielectric (2). The dielectric (2) is arranged for releasing electrons contributing to the plasma (1) from the boundary surface by the interactions.
Original languageEnglish
Patent numberEP1383359
Publication statusPublished - 21 Jan 2004

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