Method and arrangement for generating an atmospheric pressure glow discharge plasma (APG)

H.W. Vries, de (Inventor), Fuyuhiko Mori (Inventor), E. Aldea (Inventor), M.C.M. Sanden, van de (Inventor)

Research output: PatentPatent publication

Abstract

Method and arrangement ( 1 ) for generating an atmospheric pressure glow plasma APG ( 7 ), where in a plurality of electrodes, ( 4, 5 ) are arranged defining a discharge space ( 10 ) for forming said plasma ( 7 ). The electrodes ( 4,5 ) are connected to a power supply ( 8 ) providing an AC-voltage having a frequency of at least 50 kHz to the electrodes ( 4,5 ). A gaseous substance ( 6 ) is provided in said discharge space and comprises t least one of a group of argon, nitrogen and air.
Original languageEnglish
Patent numberUS2006147648
Publication statusPublished - 6 Jul 2006

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