Method and apparatus for depositing atomic layers on a substrate

R.J.W. Knaapen (Inventor), R. Olieslagers (Inventor), D. van den Berg (Inventor), M.C. van den Boer (Inventor), D.J. Maas (Inventor), J.C.J. Jack Donck, van der (Inventor), F. Roozeboom (Inventor)

Research output: PatentPatent publication

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Physics & Astronomy