Metal-organic chemical vapor deposition enabling all-solid-state Li-ion microbatteries: a short review

C. Chen, Rüdiger A. Eichel, P.H.L. Notten

Research output: Contribution to journalArticleAcademicpeer-review

13 Citations (Scopus)
124 Downloads (Pure)

Abstract

For powering small-sized electronic devices, all-solid-state Li-ion batteries are the most promising candidates due to its safety and allowing miniaturization. Thin film deposition methods can be used for building new all-solid-state architectures. Well-known deposition methods are sputter deposition, pulsed laser deposition, sol-gel deposition, atomic layer deposition, etc. This review summarizes thin film storage materials deposited by metal-organic chemical vapor deposition (MOCVD) for all-solid-state Li-ion batteries. The deposition parameters strongly influence the quality of the films, such as surface morphology, composition, electrochemical stability and cycling performance. Some materials have been successfully deposited by MOCVD into 3D–structured substrates, revealing conformal, homogeneous and high performance battery properties.
Original languageEnglish
Pages (from-to)230-247
Number of pages18
JournalJournal of Electroceramics
Volume38
Issue number2-4
DOIs
Publication statusPublished - 1 Jun 2017

Keywords

  • All-solid-state Three dimension Lithium-ions batteries Metal-organic chemical vapor deposition Thin film
  • Lithium-ions batteries
  • Metal-organic chemical vapor deposition
  • Three dimension
  • All-solid-state
  • Thin film

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