Metal free graphene synthesis on insulating or semiconducting substrates

Z. Tomovic (Inventor), Nils-Eike Weber (Inventor), Axel Binder (Inventor), Norbert Wagner (Inventor)

Research output: PatentPatent publication

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Abstract

The present invention relates to a process for preparing graphene by chemical vapour deposition (CVD), wherein an insulating or semiconducting inorganic substrate is provided in a chemical vapour deposition (CVD) reactor and subjected to a thermal pre-treatment in a hydrogen-containing atmosphere,and graphene is deposited on the inorganic substrate by bringing a gaseous oxidant and a carbon-containing precursor into contact with the inorganic substrate.
Original languageEnglish
Patent numberWO2017/064113Al
Priority date15/10/15
Filing date12/10/16
Publication statusPublished - 20 Apr 2017
Externally publishedYes

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