Membrane couplers and photodetectors for optical interconnections on CMOS ICs

P.R.A. Binetti; X.J.M. Leijtens; M. Nikoufard; T. Vries, de; Y.S. Oei; L. Di Cioccio; J.-M. Fédéli; C. Lagahe; R. Orobtchouk; C. Seassal; P.J. Veldhoven, van; R. Nötzel; M.K. Smit

Membrane couplers and photodetectors for optical interconnections on CMOS ICs

P.R.A. Binetti, X.J.M. Leijtens, M. Nikoufard, T. Vries, de, Y.S. Oei, L. Di Cioccio, J.-M. Fédéli, C. Lagahe, R. Orobtchouk, C. Seassal, P.J. Veldhoven, van, R. Nötzel, M.K. Smit

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

We introduce a compact photodetector (PD) suitable for photonic interconnections on silicon ICs. In such applications, the optical sources and detectors are linked via waveguides in an interconnection layer which is on top of CMOS circuitry. The photonic devices are fabricated with wafer scale processing steps, guaranteeing compatibility towards future generation electronic IC processing. In our approach, the optical signals propagating through the waveguides in the interconnection layer are coupled into the PDs via InP membrane waveguides. These coupling structures were designed using 3D modal analysis. Device simulation and fabrication are described in this paper.

Original language	English
Title of host publication	Proceedings of the 11th Annual Symposium of the IEEE/LEOS Benelux Chapter, 30 November - 1 December 2006, Eindhoven, The Netherlands
Editors	A.M.J. Koonen, X.J.M. Leijtens
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Pages	237-240
ISBN (Print)	90-6144-989-8
Publication status	Published - 2006
Event	11th Annual Symposium of the IEEE/LEOS Benelux Chapter - Eindhoven, Netherlands Duration: 30 Nov 2006 → 1 Dec 2006

Conference

Conference	11th Annual Symposium of the IEEE/LEOS Benelux Chapter
Country/Territory	Netherlands
City	Eindhoven
Period	30/11/06 → 1/12/06

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Binetti, P. R. A., Leijtens, X. J. M., Nikoufard, M., Vries, de, T., Oei, Y. S., Di Cioccio, L., Fédéli, J-M., Lagahe, C., Orobtchouk, R., Seassal, C., Veldhoven, van, P. J., Nötzel, R., & Smit, M. K. (2006). Membrane couplers and photodetectors for optical interconnections on CMOS ICs. In A. M. J. Koonen, & X. J. M. Leijtens (Eds.), Proceedings of the 11th Annual Symposium of the IEEE/LEOS Benelux Chapter, 30 November - 1 December 2006, Eindhoven, The Netherlands (pp. 237-240). Technische Universiteit Eindhoven.

Binetti, P.R.A. ; Leijtens, X.J.M. ; Nikoufard, M. et al. / Membrane couplers and photodetectors for optical interconnections on CMOS ICs. Proceedings of the 11th Annual Symposium of the IEEE/LEOS Benelux Chapter, 30 November - 1 December 2006, Eindhoven, The Netherlands. editor / A.M.J. Koonen ; X.J.M. Leijtens. Eindhoven : Technische Universiteit Eindhoven, 2006. pp. 237-240

@inproceedings{46e9a372a2704b6ab455e8a45eb2d28a,

title = "Membrane couplers and photodetectors for optical interconnections on CMOS ICs",

abstract = "We introduce a compact photodetector (PD) suitable for photonic interconnections on silicon ICs. In such applications, the optical sources and detectors are linked via waveguides in an interconnection layer which is on top of CMOS circuitry. The photonic devices are fabricated with wafer scale processing steps, guaranteeing compatibility towards future generation electronic IC processing. In our approach, the optical signals propagating through the waveguides in the interconnection layer are coupled into the PDs via InP membrane waveguides. These coupling structures were designed using 3D modal analysis. Device simulation and fabrication are described in this paper.",

author = "P.R.A. Binetti and X.J.M. Leijtens and M. Nikoufard and {Vries, de}, T. and Y.S. Oei and {Di Cioccio}, L. and J.-M. F{\'e}d{\'e}li and C. Lagahe and R. Orobtchouk and C. Seassal and {Veldhoven, van}, P.J. and R. N{\"o}tzel and M.K. Smit",

year = "2006",

language = "English",

isbn = "90-6144-989-8",

pages = "237--240",

editor = "A.M.J. Koonen and X.J.M. Leijtens",

booktitle = "Proceedings of the 11th Annual Symposium of the IEEE/LEOS Benelux Chapter, 30 November - 1 December 2006, Eindhoven, The Netherlands",

publisher = "Technische Universiteit Eindhoven",

note = "11th Annual Symposium of the IEEE/LEOS Benelux Chapter ; Conference date: 30-11-2006 Through 01-12-2006",

}

Binetti, PRA, Leijtens, XJM, Nikoufard, M, Vries, de, T, Oei, YS, Di Cioccio, L, Fédéli, J-M, Lagahe, C, Orobtchouk, R, Seassal, C, Veldhoven, van, PJ, Nötzel, R & Smit, MK 2006, Membrane couplers and photodetectors for optical interconnections on CMOS ICs. in AMJ Koonen & XJM Leijtens (eds), Proceedings of the 11th Annual Symposium of the IEEE/LEOS Benelux Chapter, 30 November - 1 December 2006, Eindhoven, The Netherlands. Technische Universiteit Eindhoven, Eindhoven, pp. 237-240, 11th Annual Symposium of the IEEE/LEOS Benelux Chapter, Eindhoven, Netherlands, 30/11/06.

Membrane couplers and photodetectors for optical interconnections on CMOS ICs. / Binetti, P.R.A.; Leijtens, X.J.M.; Nikoufard, M. et al.

Proceedings of the 11th Annual Symposium of the IEEE/LEOS Benelux Chapter, 30 November - 1 December 2006, Eindhoven, The Netherlands. ed. / A.M.J. Koonen; X.J.M. Leijtens. Eindhoven : Technische Universiteit Eindhoven, 2006. p. 237-240.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Membrane couplers and photodetectors for optical interconnections on CMOS ICs

AU - Binetti, P.R.A.

AU - Leijtens, X.J.M.

AU - Nikoufard, M.

AU - Vries, de, T.

AU - Oei, Y.S.

AU - Di Cioccio, L.

AU - Fédéli, J.-M.

AU - Lagahe, C.

AU - Orobtchouk, R.

AU - Seassal, C.

AU - Veldhoven, van, P.J.

AU - Nötzel, R.

AU - Smit, M.K.

PY - 2006

Y1 - 2006

N2 - We introduce a compact photodetector (PD) suitable for photonic interconnections on silicon ICs. In such applications, the optical sources and detectors are linked via waveguides in an interconnection layer which is on top of CMOS circuitry. The photonic devices are fabricated with wafer scale processing steps, guaranteeing compatibility towards future generation electronic IC processing. In our approach, the optical signals propagating through the waveguides in the interconnection layer are coupled into the PDs via InP membrane waveguides. These coupling structures were designed using 3D modal analysis. Device simulation and fabrication are described in this paper.

AB - We introduce a compact photodetector (PD) suitable for photonic interconnections on silicon ICs. In such applications, the optical sources and detectors are linked via waveguides in an interconnection layer which is on top of CMOS circuitry. The photonic devices are fabricated with wafer scale processing steps, guaranteeing compatibility towards future generation electronic IC processing. In our approach, the optical signals propagating through the waveguides in the interconnection layer are coupled into the PDs via InP membrane waveguides. These coupling structures were designed using 3D modal analysis. Device simulation and fabrication are described in this paper.

M3 - Conference contribution

SN - 90-6144-989-8

SP - 237

EP - 240

BT - Proceedings of the 11th Annual Symposium of the IEEE/LEOS Benelux Chapter, 30 November - 1 December 2006, Eindhoven, The Netherlands

A2 - Koonen, A.M.J.

A2 - Leijtens, X.J.M.

PB - Technische Universiteit Eindhoven

CY - Eindhoven

T2 - 11th Annual Symposium of the IEEE/LEOS Benelux Chapter

Y2 - 30 November 2006 through 1 December 2006

ER -

Binetti PRA, Leijtens XJM, Nikoufard M, Vries, de T, Oei YS, Di Cioccio L et al. Membrane couplers and photodetectors for optical interconnections on CMOS ICs. In Koonen AMJ, Leijtens XJM, editors, Proceedings of the 11th Annual Symposium of the IEEE/LEOS Benelux Chapter, 30 November - 1 December 2006, Eindhoven, The Netherlands. Eindhoven: Technische Universiteit Eindhoven. 2006. p. 237-240

Membrane couplers and photodetectors for optical interconnections on CMOS ICs

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