Membrane couplers and photodetectors for optical interconnections on CMOS ICs

P.R.A. Binetti, X.J.M. Leijtens, M. Nikoufard, T. Vries, de, Y.S. Oei, L. Di Cioccio, J.-M. Fédéli, C. Lagahe, R. Orobtchouk, C. Seassal, P.J. Veldhoven, van, R. Nötzel, M.K. Smit

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Abstract

We introduce a compact photodetector (PD) suitable for photonic interconnections on silicon ICs. In such applications, the optical sources and detectors are linked via waveguides in an interconnection layer which is on top of CMOS circuitry. The photonic devices are fabricated with wafer scale processing steps, guaranteeing compatibility towards future generation electronic IC processing. In our approach, the optical signals propagating through the waveguides in the interconnection layer are coupled into the PDs via InP membrane waveguides. These coupling structures were designed using 3D modal analysis. Device simulation and fabrication are described in this paper.
Original languageEnglish
Title of host publicationProceedings of the 11th Annual Symposium of the IEEE/LEOS Benelux Chapter, 30 November - 1 December 2006, Eindhoven, The Netherlands
EditorsA.M.J. Koonen, X.J.M. Leijtens
Place of PublicationEindhoven
PublisherTechnische Universiteit Eindhoven
Pages237-240
ISBN (Print)90-6144-989-8
Publication statusPublished - 2006
Event11th Annual Symposium of the IEEE/LEOS Benelux Chapter - Eindhoven, Netherlands
Duration: 30 Nov 20061 Dec 2006

Conference

Conference11th Annual Symposium of the IEEE/LEOS Benelux Chapter
CountryNetherlands
CityEindhoven
Period30/11/061/12/06

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