Mechanism and kinetics of silylation of resist layers from the gas phase

R.J. Visser; J.P.W. Schellekens; M.E. Reuhman-Huisken; L.J. IJzendoorn, van

Mechanism and kinetics of silylation of resist layers from the gas phase

R.J. Visser, J.P.W. Schellekens, M.E. Reuhman-Huisken, L.J. IJzendoorn, van

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proceedings of the 4th Conference on Advances in Resist Technology and Processing, 2-3 March 1987, Santa Clara, California
Editors	M.J. Bowden
Place of Publication	Bellingham
Publisher	SPIE
Pages	111-117
ISBN (Print)	0-89252-806-0
Publication status	Published - 1987

Publication series

Name	Proceedings of SPIE
Volume	771
ISSN (Print)	0277-786X

Cite this

@inproceedings{6c71c06a4e3f4dbc8924ee3a1ef3dcd9,

title = "Mechanism and kinetics of silylation of resist layers from the gas phase",

author = "R.J. Visser and J.P.W. Schellekens and M.E. Reuhman-Huisken and {IJzendoorn, van}, L.J.",

year = "1987",

language = "English",

isbn = "0-89252-806-0",

series = "Proceedings of SPIE",

publisher = "SPIE",

pages = "111--117",

editor = "M.J. Bowden",

booktitle = "Proceedings of the 4th Conference on Advances in Resist Technology and Processing, 2-3 March 1987, Santa Clara, California",

address = "United States",

}

Mechanism and kinetics of silylation of resist layers from the gas phase. / Visser, R.J.; Schellekens, J.P.W.; Reuhman-Huisken, M.E. et al.

Proceedings of the 4th Conference on Advances in Resist Technology and Processing, 2-3 March 1987, Santa Clara, California. ed. / M.J. Bowden. Bellingham : SPIE, 1987. p. 111-117 (Proceedings of SPIE; Vol. 771).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Mechanism and kinetics of silylation of resist layers from the gas phase

AU - Visser, R.J.

AU - Schellekens, J.P.W.

AU - Reuhman-Huisken, M.E.

AU - IJzendoorn, van, L.J.

PY - 1987

Y1 - 1987

M3 - Conference contribution

SN - 0-89252-806-0

T3 - Proceedings of SPIE

SP - 111

EP - 117

BT - Proceedings of the 4th Conference on Advances in Resist Technology and Processing, 2-3 March 1987, Santa Clara, California

A2 - Bowden, M.J.

PB - SPIE

CY - Bellingham

ER -