Mechanically probing time-dependent mechanics in metallic MEMS

J.P.M. Hoefnagels; L.I.J.C. Bergers; N.K.R. Delhey; M.G.D. Geers

doi:10.1007/978-1-4419-8825-6_7

Mechanically probing time-dependent mechanics in metallic MEMS

J.P.M. Hoefnagels
, L.I.J.C. Bergers
, N.K.R. Delhey
, M.G.D. Geers

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

274 Downloads (Pure)

Abstract

The reliability of metallic micro-electromechanical systems (MEMS) depends on time-dependent deformation such as creep. To this end, a purely mechanical experimental methodology for studying the time-dependent deformation of free-standing microbeams has been developed. It is found most suitable for the investigation of creep due to the simplicity of sample handling and preparation and setup design, whilst maximizing long term stability and displacement resolution. The methodology entails the application of a constant deflection to a µm-sized free-standing aluminum cantilever beam for a prolonged period of time. After this load is removed, the deformation evolution is immediately recorded by acquiring surface height profiles through confocal optical profilometry. Image correlation and an algorithm based on elastic beam theory are applied to the full-field beam profiles to yield the tip deflection as a function of time. The methodology yields the tip deflection as function of time with ~3 nm precision.

Original language	English
Title of host publication	MEMS and Nanotechnology - Proceedings of the 2010 Annual Conference on Experimental and Applied Mechanics
Editors	T. Proulx
Place of Publication	New York
Publisher	Springer
Pages	43-48
Number of pages	6
Volume	2
ISBN (Print)	978-1-4419-8824-9
DOIs	https://doi.org/10.1007/978-1-4419-8825-6_7
Publication status	Published - 2011
Event	2010 Annual Conference on Experimental and Applied Mechanics - Indianapolis, United States Duration: 7 Jun 2010 → 10 Jun 2010

Conference

Conference	2010 Annual Conference on Experimental and Applied Mechanics
Country/Territory	United States
City	Indianapolis
Period	7/06/10 → 10/06/10

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10.1007/978-1-4419-8825-6_7

590532253599797Final author version , 485 KB

Cite this

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title = "Mechanically probing time-dependent mechanics in metallic MEMS",

abstract = "The reliability of metallic micro-electromechanical systems (MEMS) depends on time-dependent deformation such as creep. To this end, a purely mechanical experimental methodology for studying the time-dependent deformation of free-standing microbeams has been developed. It is found most suitable for the investigation of creep due to the simplicity of sample handling and preparation and setup design, whilst maximizing long term stability and displacement resolution. The methodology entails the application of a constant deflection to a µm-sized free-standing aluminum cantilever beam for a prolonged period of time. After this load is removed, the deformation evolution is immediately recorded by acquiring surface height profiles through confocal optical profilometry. Image correlation and an algorithm based on elastic beam theory are applied to the full-field beam profiles to yield the tip deflection as a function of time. The methodology yields the tip deflection as function of time with \textasciitilde{}3 nm precision.",

author = "J.P.M. Hoefnagels and L.I.J.C. Bergers and N.K.R. Delhey and M.G.D. Geers",

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publisher = "Springer",

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Hoefnagels, JPM, Bergers, LIJC, Delhey, NKR & Geers, MGD 2011, Mechanically probing time-dependent mechanics in metallic MEMS. in T Proulx (ed.), MEMS and Nanotechnology - Proceedings of the 2010 Annual Conference on Experimental and Applied Mechanics. vol. 2, Springer, New York, pp. 43-48, 2010 Annual Conference on Experimental and Applied Mechanics, Indianapolis, Indiana, United States, 7/06/10. https://doi.org/10.1007/978-1-4419-8825-6_7

Mechanically probing time-dependent mechanics in metallic MEMS. / Hoefnagels, J.P.M.; Bergers, L.I.J.C.; Delhey, N.K.R. et al.
MEMS and Nanotechnology - Proceedings of the 2010 Annual Conference on Experimental and Applied Mechanics. ed. / T. Proulx. Vol. 2 New York: Springer, 2011. p. 43-48.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AB - The reliability of metallic micro-electromechanical systems (MEMS) depends on time-dependent deformation such as creep. To this end, a purely mechanical experimental methodology for studying the time-dependent deformation of free-standing microbeams has been developed. It is found most suitable for the investigation of creep due to the simplicity of sample handling and preparation and setup design, whilst maximizing long term stability and displacement resolution. The methodology entails the application of a constant deflection to a µm-sized free-standing aluminum cantilever beam for a prolonged period of time. After this load is removed, the deformation evolution is immediately recorded by acquiring surface height profiles through confocal optical profilometry. Image correlation and an algorithm based on elastic beam theory are applied to the full-field beam profiles to yield the tip deflection as a function of time. The methodology yields the tip deflection as function of time with ~3 nm precision.

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ER -

Mechanically probing time-dependent mechanics in metallic MEMS

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