Mechanical measurement of the residual stress in thin PVD films

R.O.E. Vijgen, J.H. Dautzenberg

    Research output: Contribution to journalArticlePopular

    55 Citations (Scopus)
    244 Downloads (Pure)
    Original languageEnglish
    Pages (from-to)264-269
    JournalThin Solid Films
    Volume270
    Issue number1-2
    DOIs
    Publication statusPublished - 1995

    Cite this