Mechanical measurement of the residual stress in thin PVD films

R.O.E. Vijgen, J.H. Dautzenberg

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@article{ff25e9a59291491bac1abd640a5ab94e,

title = "Mechanical measurement of the residual stress in thin PVD films",

author = "R.O.E. Vijgen and J.H. Dautzenberg",

year = "1995",

doi = "10.1016/0040-6090(95)06984-4",

language = "English",

volume = "270",

pages = "264--269",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

number = "1-2",

}