Mechanical failure prediction of copper/low-k dielectric interconnects using cohesive zone modeling

B.A.E. Hal, van, R.H.J. Peerlings, G.Q. Zhang

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProceedings of 22nd Advanced Metallization Conference
Place of PublicationUnited States, Colorado Springs, Colorado
Publication statusPublished - 2005

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