| Original language | English |
|---|---|
| Place of Publication | Eindhoven |
| Publisher | Eindhoven University of Technology |
| Number of pages | 28 |
| Publication status | Published - 2011 |
Mechanical design of a six degree of freedom magnetic levitated wafer stage
G.A. Erp, van, M. Steinbuch (Supervisor), H.M. Gutierrez (Supervisor)
Research output: Book/Report › Report › Academic