Measuring time-dependent mechanics in metallic MEMS

L.I.J.C. Bergers, N.K.R. Delhey, J.P.M. Hoefnagels, M.G.D. Geers

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
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Physics & Astronomy