Measurements of density and temperature profiles in an argon inductively coupled plasma

S. Nowak, A.C.A.P. van Lammeren, J.J.A.M. Mullen, van der, D.C. Schram, B. Sijde, van der

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publicationISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1
EditorsK. Akashi , A. Kinbara
Place of PublicationTokyo
Pages398-403
Publication statusPublished - 1987
Event8th International Symposium on Plasma Chemistry (ISPC 8) - Tokyo, Japan
Duration: 31 Aug 19874 Sep 1987
Conference number: 8

Conference

Conference8th International Symposium on Plasma Chemistry (ISPC 8)
Abbreviated titleISPC/Tokyo 1987
CountryJapan
CityTokyo
Period31/08/874/09/87

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