Measurements and semi-empirical model describing the onset of powder formation as a function of process parameters in an rf silane-hydrogen discharge

M.N. van den Donker, E.A.G. Hamers, G.M.W. Kroesen

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)

Abstract

The transition pressure above which powder formation takes place was experimentally determined in a parallel plate RF silane-hydrogen plasma as a function of the process parameters-power, temperature, gas flow and hydrogen dilution-using the dc-bias voltage as powder formation indicator. The resulting empirical scaling law describes in what conditions powders are formed and in what conditions the plasma is powder-free. Second, a semi-empirical model was developed that treats the nano-particle density in the plasma. This model was applied to analytically describe the transition pressure above which nano-particle coagulation takes place as a function of process parameters. The resulting modelled scaling law shows good correspondence with the experimentally found scaling law. Finally, a series of amorphous silicon films was deposited. The reflection-transmission spectra of the films were measured and modelled through Tauc-Lorentz formalism. The optical analysis shows that at around the plasma transition pressure there occurs also a transition in the properties of the deposited material.
Original languageEnglish
Pages (from-to)2382-2389
JournalJournal of Physics D: Applied Physics
Volume38
Issue number14
DOIs
Publication statusPublished - 2005

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