Measurement and development of water intake models for wafer table related materials

Ivan Tulus

Research output: Thesis › EngD Thesis

Original language	English
Supervisors/Advisors	Kosinov, Nikolay A., Supervisor Roelofsma, John, Supervisor Ledezma-Yanez, Isis, External supervisor, External person
Award date	30 Sept 2020
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Publication status	Published - 30 Sept 2020

PdEng thesis. - Confidential

Cite this

@phdthesis{f517e57dd96945f090c8f29bed4c6843,

title = "Measurement and development of water intake models for wafer table related materials",

author = "Ivan Tulus",

note = "PdEng thesis. - Confidential",

year = "2020",

month = sep,

day = "30",

language = "English",

series = "PdEng thesis",

publisher = "Technische Universiteit Eindhoven",

}