MBE of quantum wires and quantum dots

R. Nötzel, K.H. Ploog

Research output: Contribution to journalArticleAcademicpeer-review

20 Citations (Scopus)

Abstract

The fabrication of semiconductor quantum wire and quantum dot arrays with high uniformity and controlled positioning is an outstanding challenge in nanostructure materials science. We demonstrate a significant step forward by combining self-organized epitaxial growth with lithographic patterning and the assistance of atomic hydrogen on high-index GaAs substrates. This concept provides a strict control of chemical, structural and geometric perfection of these semiconductor nanostructures which is needed for realistic device applications.
Original languageEnglish
Pages (from-to)8-12
Number of pages5
JournalJournal of Crystal Growth
Volume227-228
Issue number1
DOIs
Publication statusPublished - 2001

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