Material structure of microcrystalline silicon deposited with an expanding thermal plasma

C. Smit, D.L. Williamson, M.C.M. Sanden, van de, R.A.C.M.M. Swaaij, van

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)
Original languageEnglish
Title of host publicationAmorphous and nanocrystalline silicon-based films
Place of PublicationWarrendale, Pa
PublisherMaterials Research Society
Pages527-532
ISBN (Print)1-558-99699-0
Publication statusPublished - 2003
Event2003 Amorphous and Nanocrystalline Silicon-Based Films Symposium - San Francisco, United States
Duration: 22 Apr 200325 Apr 2003

Publication series

NameMaterials Research Society Symposium Proceedings
Volume762
ISSN (Print)0272-9172

Conference

Conference2003 Amorphous and Nanocrystalline Silicon-Based Films Symposium
CountryUnited States
CitySan Francisco
Period22/04/0325/04/03

Cite this