Mass spectrometry study of Li2CO3Film growth by thermal and plasma-assisted atomic layer deposition

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Abstract

:Quadrupole mass spectrometry was carried out to detect and identify the reaction products during atomic layer deposition (ALD) of lithium carbonate (Li2CO3). We examined gas phase species for thermal ALD using a LiOtBu precursor together with H2O and CO2and plasma-assisted ALD using the same lithium precursor combined with an O2plasma. For both processes it was concluded that in the first half-cycle the LiOtBu chemisorbs on the surface by an association reaction of the complete precursor whereas in the second half-cycle the organic ligand is abstracted as tert-butanol. The differences between the two processes lie mainly in the formation of CO2andH2O reaction byproducts in the second half-cycle when an O2 plasma is used as coreactant instead of H2O. The generation of CO2supports the fact that itis possible to deposit Li2CO3films directly by plasma-assisted ALD. Instead, in the case of thermal ALD, an additional CO2dose step is required to depositLi2CO3and suppress LiOH or Li2O formation. The reaction with CO2appears to be reversible at higher deposition temperatures (T≥250°C) and by using extended plasma exposure times, and therefore the composition of the plasma-assisted ALD films can be varied between Li2CO3 and Li2O.
Original languageEnglish
Pages (from-to)4109-4115
Number of pages7
JournalJournal of Physical Chemistry C
Volume123
Issue number7
DOIs
Publication statusPublished - 21 Feb 2019

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Plasma Gases
Atomic layer deposition
atomic layer epitaxy
Mass spectrometry
mass spectroscopy
Plasmas
cycles
Lithium
lithium
tert-Butyl Alcohol
Lithium Carbonate
association reactions
Butenes
Reaction products
reaction products
Byproducts
Hot Temperature
Carbonates
carbonates
Deposits

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title = "Mass spectrometry study of Li2CO3Film growth by thermal and plasma-assisted atomic layer deposition",
abstract = ":Quadrupole mass spectrometry was carried out to detect and identify the reaction products during atomic layer deposition (ALD) of lithium carbonate (Li2CO3). We examined gas phase species for thermal ALD using a LiOtBu precursor together with H2O and CO2and plasma-assisted ALD using the same lithium precursor combined with an O2plasma. For both processes it was concluded that in the first half-cycle the LiOtBu chemisorbs on the surface by an association reaction of the complete precursor whereas in the second half-cycle the organic ligand is abstracted as tert-butanol. The differences between the two processes lie mainly in the formation of CO2andH2O reaction byproducts in the second half-cycle when an O2 plasma is used as coreactant instead of H2O. The generation of CO2supports the fact that itis possible to deposit Li2CO3films directly by plasma-assisted ALD. Instead, in the case of thermal ALD, an additional CO2dose step is required to depositLi2CO3and suppress LiOH or Li2O formation. The reaction with CO2appears to be reversible at higher deposition temperatures (T≥250°C) and by using extended plasma exposure times, and therefore the composition of the plasma-assisted ALD films can be varied between Li2CO3 and Li2O.",
author = "Norah Hornsveld and Erwin Kessels and Adriana Creatore",
year = "2019",
month = "2",
day = "21",
doi = "10.1021/acs.jpcc.8b12216",
language = "English",
volume = "123",
pages = "4109--4115",
journal = "Journal of Physical Chemistry C",
issn = "1932-7455",
publisher = "American Chemical Society",
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T1 - Mass spectrometry study of Li2CO3Film growth by thermal and plasma-assisted atomic layer deposition

AU - Hornsveld, Norah

AU - Kessels, Erwin

AU - Creatore, Adriana

PY - 2019/2/21

Y1 - 2019/2/21

N2 - :Quadrupole mass spectrometry was carried out to detect and identify the reaction products during atomic layer deposition (ALD) of lithium carbonate (Li2CO3). We examined gas phase species for thermal ALD using a LiOtBu precursor together with H2O and CO2and plasma-assisted ALD using the same lithium precursor combined with an O2plasma. For both processes it was concluded that in the first half-cycle the LiOtBu chemisorbs on the surface by an association reaction of the complete precursor whereas in the second half-cycle the organic ligand is abstracted as tert-butanol. The differences between the two processes lie mainly in the formation of CO2andH2O reaction byproducts in the second half-cycle when an O2 plasma is used as coreactant instead of H2O. The generation of CO2supports the fact that itis possible to deposit Li2CO3films directly by plasma-assisted ALD. Instead, in the case of thermal ALD, an additional CO2dose step is required to depositLi2CO3and suppress LiOH or Li2O formation. The reaction with CO2appears to be reversible at higher deposition temperatures (T≥250°C) and by using extended plasma exposure times, and therefore the composition of the plasma-assisted ALD films can be varied between Li2CO3 and Li2O.

AB - :Quadrupole mass spectrometry was carried out to detect and identify the reaction products during atomic layer deposition (ALD) of lithium carbonate (Li2CO3). We examined gas phase species for thermal ALD using a LiOtBu precursor together with H2O and CO2and plasma-assisted ALD using the same lithium precursor combined with an O2plasma. For both processes it was concluded that in the first half-cycle the LiOtBu chemisorbs on the surface by an association reaction of the complete precursor whereas in the second half-cycle the organic ligand is abstracted as tert-butanol. The differences between the two processes lie mainly in the formation of CO2andH2O reaction byproducts in the second half-cycle when an O2 plasma is used as coreactant instead of H2O. The generation of CO2supports the fact that itis possible to deposit Li2CO3films directly by plasma-assisted ALD. Instead, in the case of thermal ALD, an additional CO2dose step is required to depositLi2CO3and suppress LiOH or Li2O formation. The reaction with CO2appears to be reversible at higher deposition temperatures (T≥250°C) and by using extended plasma exposure times, and therefore the composition of the plasma-assisted ALD films can be varied between Li2CO3 and Li2O.

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