Mass-resolved ion energy measurements at the grounded electrode of an argon rf plasma

R.J.M.M. Snijkers; M.J.M. van Sambeek; G.M.W. Kroesen; F.J. Hoog, de

doi:10.1063/1.110087

Mass-resolved ion energy measurements at the grounded electrode of an argon rf plasma

R.J.M.M. Snijkers, M.J.M. van Sambeek, G.M.W. Kroesen, F.J. Hoog, de

Research output: Contribution to journal › Article › Academic › peer-review

25 Citations (Scopus)

225 Downloads (Pure)

Abstract

The mass-resolved ion energy distribution (IED) at the grounded electrode has been determined in a 13.56-MHz parallel-plate plasma in argon. The IED is determined of Ar+, Ar2+, Ar2+, ArH+, H3O+, and H3+ for several plasma conditions. At pressures higher than 10 mTorr, collisions in the sheath become important. The IED of Ar+ is particularly defined by charge exchange collisions in the sheath while the IED of the other ions shows only features generated by elastic scattering. This is confirmed by Monte Carlo simulations. The measurements clearly show the necessity of simultaneous mass and energy separation, rather than the nonmass-resolved IED reported in the literature.

Original language	English
Pages (from-to)	308-310
Journal	Applied Physics Letters
Volume	63
Issue number	3
DOIs	https://doi.org/10.1063/1.110087
Publication status	Published - 1993

Access to Document

10.1063/1.110087

Metis219634Final published version, 380 KB

Cite this

@article{ea062193ff0e466aaecec81a3774a0b3,

title = "Mass-resolved ion energy measurements at the grounded electrode of an argon rf plasma",

abstract = "The mass-resolved ion energy distribution (IED) at the grounded electrode has been determined in a 13.56-MHz parallel-plate plasma in argon. The IED is determined of Ar+, Ar2+, Ar2+, ArH+, H3O+, and H3+ for several plasma conditions. At pressures higher than 10 mTorr, collisions in the sheath become important. The IED of Ar+ is particularly defined by charge exchange collisions in the sheath while the IED of the other ions shows only features generated by elastic scattering. This is confirmed by Monte Carlo simulations. The measurements clearly show the necessity of simultaneous mass and energy separation, rather than the nonmass-resolved IED reported in the literature.",

author = "R.J.M.M. Snijkers and {van Sambeek}, M.J.M. and G.M.W. Kroesen and {Hoog, de}, F.J.",

year = "1993",

doi = "10.1063/1.110087",

language = "English",

volume = "63",

pages = "308--310",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "3",

}

TY - JOUR

T1 - Mass-resolved ion energy measurements at the grounded electrode of an argon rf plasma

AU - Snijkers, R.J.M.M.

AU - van Sambeek, M.J.M.

AU - Kroesen, G.M.W.

AU - Hoog, de, F.J.

PY - 1993

Y1 - 1993

N2 - The mass-resolved ion energy distribution (IED) at the grounded electrode has been determined in a 13.56-MHz parallel-plate plasma in argon. The IED is determined of Ar+, Ar2+, Ar2+, ArH+, H3O+, and H3+ for several plasma conditions. At pressures higher than 10 mTorr, collisions in the sheath become important. The IED of Ar+ is particularly defined by charge exchange collisions in the sheath while the IED of the other ions shows only features generated by elastic scattering. This is confirmed by Monte Carlo simulations. The measurements clearly show the necessity of simultaneous mass and energy separation, rather than the nonmass-resolved IED reported in the literature.

AB - The mass-resolved ion energy distribution (IED) at the grounded electrode has been determined in a 13.56-MHz parallel-plate plasma in argon. The IED is determined of Ar+, Ar2+, Ar2+, ArH+, H3O+, and H3+ for several plasma conditions. At pressures higher than 10 mTorr, collisions in the sheath become important. The IED of Ar+ is particularly defined by charge exchange collisions in the sheath while the IED of the other ions shows only features generated by elastic scattering. This is confirmed by Monte Carlo simulations. The measurements clearly show the necessity of simultaneous mass and energy separation, rather than the nonmass-resolved IED reported in the literature.

U2 - 10.1063/1.110087

DO - 10.1063/1.110087

M3 - Article

SN - 0003-6951

VL - 63

SP - 308

EP - 310

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 3

ER -

Mass-resolved ion energy measurements at the grounded electrode of an argon rf plasma

Abstract

Access to Document

Fingerprint

Cite this