Abstract
This paper concerns the position accuracy of movingmagnet planar motor geometries for which the manufacturing tolerances are taken into account. A stochastic analysis is performed in which a randomized set of 10000 tolerances is applied to each geometry and the position error is calculated for a motion profile. The 3-sigma values of the manufacturing tolerances on the individual coils and magnets are determined to achieve an accuracy in the sub 100 nm range.
| Original language | English |
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| Title of host publication | Manufacturing Tolerances and Position Accuracy of Moving-Magnet Planar Motors |
| Publisher | Institute of Electrical and Electronics Engineers |
| Number of pages | 1 |
| ISBN (Electronic) | 979-8-3315-3328-1 |
| DOIs | |
| Publication status | Published - 10 Jul 2025 |
| Event | 15th International Symposium on Linear Drivers for Industry Applications, LDIA 2025 - Daejeon, Korea, Republic of Duration: 18 May 2025 → 21 May 2025 |
Conference
| Conference | 15th International Symposium on Linear Drivers for Industry Applications, LDIA 2025 |
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| Abbreviated title | LDIA 2025 |
| Country/Territory | Korea, Republic of |
| City | Daejeon |
| Period | 18/05/25 → 21/05/25 |