Manufacturing Tolerances and Position Accuracy of Moving-Magnet Planar Motors

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Abstract

This paper concerns the position accuracy of movingmagnet planar motor geometries for which the manufacturing tolerances are taken into account. A stochastic analysis is performed in which a randomized set of 10000 tolerances is applied to each geometry and the position error is calculated for a motion profile. The 3-sigma values of the manufacturing tolerances on the individual coils and magnets are determined to achieve an accuracy in the sub 100 nm range.
Original languageEnglish
Title of host publicationManufacturing Tolerances and Position Accuracy of Moving-Magnet Planar Motors
PublisherInstitute of Electrical and Electronics Engineers
Number of pages1
ISBN (Electronic)979-8-3315-3328-1
DOIs
Publication statusPublished - 10 Jul 2025
Event15th International Symposium on Linear Drivers for Industry Applications, LDIA 2025 - Daejeon, Korea, Republic of
Duration: 18 May 202521 May 2025

Conference

Conference15th International Symposium on Linear Drivers for Industry Applications, LDIA 2025
Abbreviated titleLDIA 2025
Country/TerritoryKorea, Republic of
CityDaejeon
Period18/05/2521/05/25

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